| 초록 |
Thermo optic coefficients of polymer refractive index are ten times higher than silica and reverse value. Mach-Zehnder interferometer(MZI) type polymer/silica hybrid optical sensor has advantage of its inherent high sensitivity and accuracy. In this article, MZI type hybrid optical concentration sensor fabricated using fluorinated polymer (Optopol-HSP with Photo Acid Generator added for photoresist application) with good optical transparency and reliability. The non-stoichiometric SiO2 as a waveguide core was deposited on the silica wafer in PECVD reactor. Fluorinated polymers were applied to form over-cladding by a spin coater and then patterned via UV exposure to sensing zones as microlithography technology. Patterns of over clad were examined by a-step and SEM. Finally, MZI type hybrid waveguide circuits were fabricated and evaluated by loss test set. This research was supported in part by BK 21 |
