| 초록 |
Many applications of nanofabrication techniques, like single electron devices, electrical connection of individual molecules or ultra-high density storage media, now require the production of nano-meter structures. Here Carbon Nanowire and nanodot were achieved with PMMA by electron beam irradiation. SEM, AFM and Measurements of Resistivity characterized the resulting nanostructures. The resulting Carbon linewidths, dots and thickness were determined by the amount of electron dosage and thickness of the PMMA. |
