화학공학소재연구정보센터
학회 한국고분자학회
학술대회 2020년 가을 (10/05 ~ 10/08, 부산컨벤션센터(BEXCO))
권호 45권 1호
발표분야 기능성 고분자
제목 Vapor-Phase Synthesis of High-k, Ultrathin Polymer Dielectric with Molecular Thin, Hydrophobic Skin Layer for Extremely Stable Organic Thin-Film Transistor (OTFT) Operation
초록 A sub-20 nm, high-k copolymer dielectric with hydroxyl functionality was synthesized via initiated chemical vapor deposition (iCVD). The inherently dry environment offered by the vapor-phase polymer synthesis prompted the snuggling of polar hydroxyl functionalities into the bulk polymer film to form a molecular thin hydrophobic skin layer at its surface. The chemical composition of the copolymer dielectric was optimized systematically to achieve high dielectric constant (k~6.2) as well as extremely low leakage current densities even with sub-20 nm thickness, leading to one of the highest capacitance achieved by a single polymer dielectric to date. Exploiting the structural advantage of the crosslinked high-k polymer dielectric, high-performance OTFTs with the suppressed hysteresis were obtained owing to the hydrophobic skin layer. Furthermore, the OTFTs with the copolymer dielectric showed an unprecedentedly excellent operational stability.
저자 최준환, 임성갑
소속 KAIST
키워드 polymer dielectric; polymer thin film; high-k dielectric; organic thin-film transistor (OTFT)
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