| 학회 |
한국고분자학회 |
| 학술대회 |
2004년 가을 (10/08 ~ 10/09, 경북대학교) |
| 권호 |
29권 2호, p.20 |
| 발표분야 |
고분자 구조 및 물성 |
| 제목 |
Structural evolution in ultra-low dielectric thin films: in-situ GISAXS measurement |
| 초록 |
To determine the pore size distribution, porosity and calcination mechanism in low dielectric constant thin films, we investigated low-k thin films (4arm star-shaped poly(ε-caprolactone) polymers incorporated in the PMSSQ hybrid composite system by in-situ Grazing Incidence Small Angle X-ray Scattering (GISAXS) as a function of temperature. We obtained GISAXS data for a series of films with two kinds of porogens where the initial porogen loading ranged 10-40%. The dried composite films were thermally cured at 2℃/min up to 400℃ under vacuum. Porogens began to decompose at 300℃ and the decomposition was finally finished around 400℃. Continuous heating to the 400℃ results in the thermal decomposition of the porogen, which made the electron density difference with PMSSQ matrix. Scattering invariant changes were correlated to thermal gravimetry analysis data. By applying fitting with GISAXS equation developed in our group to the GISAXS profiles, the size and distribution of the pores generated by the calcination of porogens were determined as a function of temperature. The results are in detail discussed with considering chemical characteristics of the porogen. |
| 저자 |
윤진환1, 이병두2, 오원태3, 허규용4, 진경식5, 김제한1, 김광우2, 이문호3
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| 소속 |
1Department of Chemistry, 2Center for Integrated Molecular Systems, 3Division of Molecular of life science (BK21 program), 4and Polymer Research Institute, 5Pohang Univ. of Science and Technology |
| 키워드 |
low dielectric film; PMSSQ; porogen; GISAXS
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| E-Mail |
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