| 학회 |
한국재료학회 |
| 학술대회 |
2018년 가을 (11/07 ~ 11/09, 여수 디오션리조트) |
| 권호 |
24권 2호 |
| 발표분야 |
A. 전자/반도체 재료 분과 |
| 제목 |
Effect of thickness on ferroelectric properties of PMN Thick films deposited by AD |
| 초록 |
Pb(Mg1/3Nb2/3)O3 (PMN) is a typical relaxed ferroelectric material with A(B'B")O3 type perovskite structure. General ferroelectric hysteresis loop is not observed at room temperature because of irregularity of B-site ion. Aerosol deposition method was described that powder were accelerated and collided, deposited on the substrate. AD films had dense structure and good adhesion property by these impacts. It is also possible to fabricate films up to several micrometers on a variety of substrates in a variety of powders. In this experiment, PMN was deposited to various thicknesses using AD and electrical characteristics were compared. As the thickness became thinner, it showed high dielectric breakdown strength. Films with a thickness of 4 μm were heat treated at 450, 550 and 650 degrees, and their properties were evaluated. When a 350 kV/cm electric field is applied to the film heat treated at 450 degrees, Ps has 30.505 μC/cm2. |
| 저자 |
이승희1, 임정빈1, 최한나1, 이지선2, 지예인2, 김정윤2, 김수진2, 정대용1
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| 소속 |
1인하대, 2박문여자고등학교 |
| 키워드 |
<P>PMN; Aerosol deposition; AD</P>
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| E-Mail |
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