초록 |
In this work, we report a three-dimensional reconstruction of porous anode for Li ion battery using focused ion beam-scanning electron microscope (FIB-SEM) tomography. The anode, which consists of active material, binder and pore, was filled with silicone rubber to prevent electrode structure collapse. The FIB Ga-ion milling was carried out at 30 nA with a cutting distance of 150 nm, and SEM measurement was performed to obtain a stack (100 slices) of images of the silicone-filled anode. The beam current of FIB was controlled to find optimal condition which enables to distinguish between solid and pore phases in the images. The segmented images were assembled to create the reconstructed structure of anode. Subsequently, the reconstructed structure was characterized by calculating pore structural properties: porosity, tortuosity, connectivity, size distribution. |