| 학회 |
한국고분자학회 |
| 학술대회 |
2008년 봄 (04/10 ~ 04/11, 컨벤션 뷰로(대전)) |
| 권호 |
33권 1호 |
| 발표분야 |
기능성 고분자 |
| 제목 |
High thermal stability nanoporous SiCN ceramic film from self-assembly inorganic-organic diblock copolymer |
| 초록 |
The patterning of surface on the nanometer scale is desirable for a variety of application ranging from membranes to magnetic data storage. Block copolymer provide a very promising route to this goal since they self-assemble into ordered arrays of nanostructures. Here, large scale high oriented SiCN nanotublar film and nanoporous patterns have been successfully fabricated bay using self-assembled poly(vinyl)silazane-block-polystyrene diblock copolymer combine with nanoimprint lithography and then annealing up to 900oC under Ar atmosphere. Their nanostructure were characterized by AFM, FE-SEM, and XRD. The results show that the nanotublars exhibited all parallel straight channel perpendicular to the film surface with cylinder diameter is ~ 10 nm, the wall thickness is ~ 5 nm and the film thickness is ~ 38 nm. These exciting results have potential to open a new field for the gereration of nanostructured non-oxide ceramic for a broad class of application. |
| 저자 |
뉘엠콕닷1, 정성준1, 김봉훈1, 신동옥1, 박승학1, 이형민1, Xia Guodong1, 김상욱1, 김동표2
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| 소속 |
1KAIST 신소재공학과, 2충남대 |
| 키워드 |
block copolymer; NIL; SiCN ceramic
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| E-Mail |
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