| 학회 |
한국고분자학회 |
| 학술대회 |
2021년 가을 (10/20 ~ 10/22, 경주컨벤션센터) |
| 권호 |
46권 2호 |
| 발표분야 |
고분자 가공/복합재료 |
| 제목 |
Multimodal Sensing with a Three-Dimensional Structure |
| 초록 |
Sensors that reproduce the complex characteristics of cutaneous receptors in the skin have important potential in the context of artificial systems for controlled interactions with the physical environment. Multimodal responses with high sensitivity and wide dynamic range are essential for many such applications. This report introduces a simple, three-dimensional type of microelectromechanical sensor that incorporates monocrystalline silicon nanomembranes as piezoresistive elements. The technology provides high sensitivity measurements with millisecond response times, as supported by quantitative simulations. The fabrication and assembly processes allow scalable production of interconnected arrays of such devices with capabilities in spatiotemporal mapping. Integration with wireless data recording and transmission electronics allows operation with standard consumer devices. |
| 저자 |
박준현, 진호준, 이정우, 고영천, 정민규, 선승원, 김봉훈
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| 소속 |
숭실대 |
| 키워드 |
Piezoresistive Structure; Three dimensional; Sensors; Multimodal; Silicone elastomer
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| E-Mail |
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