화학공학소재연구정보센터
학회 한국재료학회
학술대회 2021년 가을 (11/24 ~ 11/26, 경주 라한호텔)
권호 27권 2호
발표분야 C. 에너지 재료 분과
제목 Fabrication of Perovskite Films on Large Area Textured Silicon Surface Using 2-Step Vacuum Process
초록 Perovskite solar cells(PSCs) have an efficiency of over 25%, and their efficiency is approaching the theoretical limit. Therefore, research on silicon/perovskite tandem solar cells are increasing significantly as well as perovskite single-cell research.  In order to maximize the current density, which is one of the important factors in tandem solar cells, it is important to maintain a texture shape rather than a flat incident surface to minimize light loss. However, there is a limit to conformally depositing a perovskite films(PFs) on a textured substrate with the conventional solution process. Therefore, it is necessary to research on the deposition of perovskite thin films using a dry method rather than a solution-based process.
In this study, the PFs were fabricated by sputtering and chemical vapor deposition (CVD) process which are widely used in commercial applications. Perovskite precursor were deposited by sputtering, followed by CVD process for phase converted into the PFs. The films were analyzed by X-ray diffractometer (XRD), scanning electron microscopy (SEM), transmission electron microscopy (TEM), UV-vis spectroscopy. The 10.2% efficiency PSCs were fabricated with glass/FTO/compact-TiO2/CH3NH3PbI3/spiro-OMeTAD/Au structure. Finally, it was confirmed that the PFs were conformally deposited on the 4-inch textured silicon substrate. The uniformity of reflectance and thickness was higher than 86% and 92%, respectively. This fabrication processes of the PFs are expected to be applicable to silicon/perovskite tandem solar cells.
저자 황재근1, 이상원1, 이원규1, 이솔희1, 현지연1, 정석현1, 김동환1, 강윤묵2, 이해석2
소속 1고려대, 2KU-KIST 그린스쿨대
키워드 perovskite solar cells; sputtering; CVD
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