| 학회 | 한국고분자학회 |
| 학술대회 | 2019년 봄 (04/10 ~ 04/12, 부산컨벤션센터(BEXCO)) |
| 권호 | 44권 1호 |
| 발표분야 | 기능성 고분자 |
| 제목 | Characterization of various phenolic resins as spin-on carbon hardmask materials |
| 초록 | In this study, various phenolic resins were evaluated as spin-on-carbon hardmask materials. Phenolic resins spin-coated on wafers were cured by using various curing methods, such as thermal curing, radiation curing, and photo-curing. The physico-chemical properties of the cured phenolic resins were investigated by DSC, TGA, XPS, and XRD. The etch selectivity of the crosslinked phenolic resins were evaluated for application as spin-on-carbon hard-mask materials. |
| 저자 | 노미소, 이병민, 최재학 |
| 소속 | 충남대 |
| 키워드 | spin-on carbon; phenolic resin; curing |
