| 학회 | 한국재료학회 |
| 학술대회 | 2021년 가을 (11/24 ~ 11/26, 경주 라한호텔) |
| 권호 | 27권 2호 |
| 발표분야 | E. 환경/센서 재료 분과 |
| 제목 | Development of recycling process improvement technology for commercialization of etching solution generated from semiconductor process |
| 초록 | Recently, there is a growing consensus that the transition to a 'resource recycling society' that can prevent environmental pollution and reduce resource consumption should be accelerated. This is a situation in which resources and energy conservation are becoming a big issue. Phosphoric acid produced by the existing process is used for semiconductor manufacturing, metal elements contained as impurities cause semiconductor operation errors. So far, all phosphoric acid for semiconductor manufacturing has been imported from Japan. However, in the semiconductor material, the incorporation of impurities such as metal contamination by Fe, Cu, Al, Mn, etc., ion contamination by SO42-, NO31-, and particle contamination (＜0.1㎛) has a fatal effect on the electrical performance of the semiconductor device. Therefore, in this study, an optimal method for recovering lithium was studied by removing impurities from waste generated in the secondary battery process. D2EHPA, PC-88A, and TBP 20%+D2EPHA were used to search for the optimum conditions for solvent extraction. In addition, the optimum separation time of solvent and aqueous according to O/A ratio was derived. Through this research and development, we tried to suggest an optimal manufacturing process for high-value-added phthalate fertilizer materials and semiconductor-grade phosphoric acid through the development of a recycling process that recovers high-purity phosphoric acid using waste generated from the semiconductor processing process and aluminum etching process. |
| 저자 | Se Chul Hong1, Mi Young Son1, Hee Yul Yang2, Dipak Sen3 |
| 소속 | 1Gumi Electronics & Information Technology Research Institute, 2Sebit Chem Co., 3Ltd |
| 키워드 | Recycling of resource; Waste; Battery; Recycling |
