| 학회 |
한국고분자학회 |
| 학술대회 |
2011년 봄 (04/07 ~ 04/08, 대전컨벤션센터) |
| 권호 |
36권 1호 |
| 발표분야 |
기능성 고분자 |
| 제목 |
Barrier property of alluminumoxide and metal multilayer deposited on plastic substrate for flexible display |
| 초록 |
Al2O3/metal/Al2O3 multilayer was formed on plastic substrate for barrier property enhancement. Al2O3 layer was formed on PES substrate via plasma-enhanced atomic layer deposition (PEALD) using trimethylaluminum (TMA) and oxygen. Aluminum or silver interlayer was deposited on Al2O3 layers by thermal evaporation process followed by PEALD deposition of Al2O3 again. Multilayer structure showed better performance than those of single Al2O3 layer in terms of barrier properties, bendability and mechanical properties of substrate. Layer thickness was optimized and effects of kind of metal were examined. |
| 저자 |
이종걸, 김성수
|
| 소속 |
경희대 |
| 키워드 |
barrier properties; plastic substrate; WVTR; ALD; thermal evaporation
|
| E-Mail |
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