| 초록 |
The high permeability of polymer substrate to water vapor and oxygen can corrode the organic materials in OLED devices, and thereby decreases its performance and long-term stability. Thus, gas barrier thin films with high barrier performance are required for replacing glass substrate with polymer substrate. However, the properties of thin films on the polymer substrates are very different due to chemical group difference of polymer surface. Therefore, surface modification such as plasma pretreatment is required to modify chemical group of surface. In this study, Al2O3/ZrO2 multilayers were deposited on several polymer substrates by PEALD process to enhance the barrier performance. And the barrier property, morphology and chemical composition of Al2O3/ZrO2 multilayer were investigated. Also, the surface of polymer substrates was modified by using microwave plasma cleaner, and the effect of surface modification between gas barrier thin film and polymer substrate was discussed. |
