| 초록 |
It has many problems that flexible optoelectronics such as flexible organic light emitting diode and organic photovoltaics are fabricated on plastic substrates. Especially, the permeation of water and oxygen vapor through substrates can oxidize the organic material in the device, resulting in deterioration of performance and lifetime of devices. Therefore, additional barrier layers with high barrier performance are required for replacing glass substrate with polymer substrate. In this study, we fabricated Al2O3 single layer on polyethylene naphthalate, polyether sulfone and polyethylene terephthalate substrate by plasma-enhanced atomic layer deposition process for barrier property enhancement. And barrier property, morphology and chemical composition of Al2O3 layer deposited on these substrates was investigated. Also, the influence of surface modification between Al2O3 layer and polymer substrate has been interpreted. |
